475659-74-6Relevant articles and documents
Synthesis of fluoromethylated materials in ionic liquids
Kitazume, Tomoya,Tamura, Kenji,Jiang, Zaiju,Miyake, Noriak,Kawasaki, Isamu
, p. 49 - 53 (2002)
Syntheses of fluoromethylated materials via Michael additions with the Baylis-Hillman type reaction and the reaction of fluoromethylated imines with enamines in ionic liquid are described.
STABLE ACID AMPLIFIER
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Paragraph 0144; 0145, (2018/12/01)
PROBLEM TO BE SOLVED: To provide an acid amplifier system which can be used for photolithography, especially for use in extreme UV (13.5 nm) or electron beam lithography. SOLUTION: This invention provides a sulfonic acid precursor compound represented by