- New silicon precursor compounds and method for fabricating silicon-containing thin film using the same
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A silicon precursor compound as defined by chemical formula 1 is provided. Chemical Formula 1. R in Chemical Formula 1. 1 R/R2 Represents a hydrogen atom or a methyl group. C1 -C12 Alkyl group or C3 -C12 Alkylsilyl group, R3 R/R4 Is independently hydrogen, C, or C. 1 -C12 Alkyl group, halogen group, dialkylamine group (- NR)5 R6 Alkylamine group (- NHNHR)7 ), R R represents a hydrogen atom or a methyl group. 5 To R7 Is independently C or methyl. 1 -C4 Alkyl groups.
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Paragraph 0059-0065
(2020/12/08)
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- Reactions with Radical Anions, I. Synthesis of Acyclic and Cyclic Silylated 1,2-Ethenediamines
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Reactions of radicalanions 3-. obtained by the reduction of glyoxal diimines RN=CH-CH=NR 3 (3a: R = tert-butyl; 3b: R = 2,6-xylyl) with chlorotrimethylsilane, dichlorodimethylsilane, and dichloromethylsilane afford acyclic N-mono and N,N'-disil
- Dieck, Heindirk tom,Bruder, Barbara,Franz, Klaus-Dieter
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p. 136 - 145
(2007/10/02)
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