84814-11-9Relevant articles and documents
New silicon precursor compounds and method for fabricating silicon-containing thin film using the same
-
Paragraph 0059-0065, (2020/12/08)
A silicon precursor compound as defined by chemical formula 1 is provided. Chemical Formula 1. R in Chemical Formula 1. 1 R/R2 Represents a hydrogen atom or a methyl group. C1 -C12 Alkyl group or C3 -C12 Alkylsilyl group, R3 R/R4 Is independently hydrogen, C, or C. 1 -C12 Alkyl group, halogen group, dialkylamine group (- NR)5 R6 Alkylamine group (- NHNHR)7 ), R R represents a hydrogen atom or a methyl group. 5 To R7 Is independently C or methyl. 1 -C4 Alkyl groups.