18165-31-6Relevant articles and documents
PREPARATION OF ORGANOSILANE ESTERS
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Page/Page column 12-13, (2008/06/13)
The present invention relates to a specific process for preparing organosilane esters of the formula (I) and a composition comprising more than 98% by weight of organosilane esters of the formula (I) and less than 2.0% by weight of at least one hydrocarbon and to the use of such a composition as precursor for producing a layer or film having a dielectric constant of 1 κ≤ 4.