1094698-22-2Relevant academic research and scientific papers
Photoacid generators and photoresists comprising same
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Page/Page column 16; 18, (2016/03/06)
New methods are provided for synthesis of photoacid generator compounds (“PAGs”), new photoacid generator compounds and photoresist compositions that comprise such PAG compounds. In a particular aspect, sulfonium-containing (S+) photoacid generators and methods of synthesis of sulfonium photoacid generators are provided.
PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME
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, (2011/10/19)
New methods are provided for synthesis of photoacid generator compounds (“PAGs”), new photoacid generator compounds and photoresist compositions that comprise such PAG compounds. In a particular aspect, sulfonium-containing (S+) photoacid generators and m
