1402074-34-3Relevant academic research and scientific papers
Method of preservation of fluorine-containing acid amplification
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Paragraph 0054, (2017/04/03)
A method of stabilizing a fluorine-containing acid amplifier. The method is provided to include the step of dissolving a fluorine-containing acid amplifier in an organic solvent thereby producing a solution of the fluorine-containing acid amplifier, the f
STABILIZED ACID AMPLIFIERS
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Page/Page column 45, (2012/10/18)
There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.
