3936-10-5

Upstream product

• 697-18-7 tetrafluoroethane-β-sultone 
• 62-53-3 aniline 
• 677-67-8 fluorosulfonyldifluoroacetyl fluoride 

Downstream Products

• 1402074-34-3 1,1,1-trifluoro-3-(2-methyl-1,3-dioxan-2-yl)propan-2-yl difluoro(phenylcarbamoyl)methanesulfonate 
• 1402074-32-1 2,2,2-trifluoro-1-(6,10-dioxaspiro[4.5]decan-1-yl)ethyl1,1-difluoro-2-oxo-2-(phenylamino)ethanesulfonate 
• 1354651-59-4 N-phenyl-α,α-difluoro-γ-(n-butyl)-γ-lactam 
• 1354651-58-3 N-phenyl-5-acetyloxy-2,2-difluoro-4-iodo-pentanamide 
• 1354651-57-2 N-phenyl-2,2-difluoro-4-iodo-5-phenyl-pentanamide 
• 1354651-56-1 N-phenyl-2,2-difluoro-5-hydroxy-4-iodo-pentanamide 
• 1354651-55-0 N-phenyl-2,2-difluoro-4-iodo-4-(trimethylsilyl)butanamide 
• 1354651-54-9 N-phenyl-2,2-difluoro-4-iodo-octanamide 

Relevant academic research and scientific papers

NON-IONIC LOW DIFFUSING PHOTO-ACID GENERATORS

Non-ionic photo-acid generating (PAG) compounds were prepared that contain an aryl ketone group. The disclosed non-polymeric PAGs release a strong sulfonic acid when exposed to high energy radiation such as deep UV or extreme UV light. The photo-generated sulfonic acid has a low diffusion rate in an exposed resist layer subjected to a post-exposure bake (PEB) at 100° C. to 150° C., resulting in formation of good line patterns after development. At higher temperatures, the PAGs undergo a thermal reaction to form a sulfonic acid.

FLUORINATED SULFONATE ESTERS OF ARYL KETONES FOR NON-IONIC PHOTO-ACID GENERATORS

Non-ionic photo-acid generating (PAG) compounds were prepared that contain an aryl ketone group having a perfluorinated substituent alpha to the ketone carbonyl. The non-polymeric PAGs release a sulfonic acid when exposed to high energy radiation such as deep UV or extreme UV light. The photo-generated sulfonic acid has a low diffusion rate in an exposed resist layer subjected to a post-exposure bake (PEB) at 100° C. to 150° C., resulting in formation of good line patterns after development. At higher temperatures, the PAGs can also undergo a thermal reaction to form a sulfonic acid. The perfluorinated substituent provides improved thermal stability and hydrolytic/nucleophilic stability.

STABLE ACID AMPLIFIER

PROBLEM TO BE SOLVED: To provide an acid amplifier system which can be used for photolithography, especially for use in extreme UV (13.5 nm) or electron beam lithography. SOLUTION: This invention provides a sulfonic acid precursor compound represented by

STABILIZED ACID AMPLIFIERS

There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.

Copper-mediated fluoroalkylation reactions with iododifluoroacetamides: Controlling the selectivity among cross-coupling, intramolecular cyclization, and homocoupling reactions

Cu-mediated fluoroalkylation reactions with iododifluoroacetamides 1 have been systematically investigated. It was found that three types of reactions may coexist in Cu-mediated reactions between iododifluoroacetamides and aryl/alkenyl iodides: cross-coupling, intramolecular cyclization, and homocoupling reactions. The selectivity among these three types of reactions could be controlled by tuning the substituents on the nitrogen atom of iododifluoroacetamides, and/or by removing the cross-coupling reaction partner (aryl/alkenyl halides). The general rule is as follows: (a) in the presence of proper aryl/alkenyl iodides, the cross-coupling products 2 (or 6) are generally formed as the major products; (b) in the absence of aryl/alkenyl iodides, and when R1 = alkyl and R2 = aryl groups, or when R 1 = R2 = aryl groups, the intramolecular cyclization products 3 can be formed predominantly; and (c) in the absence of aryl/alkenyl iodides, and when R1 = R2 = alkyl groups, or when R 1 = H and R2 = alkyl, aryl groups, the homocoupling products 4 can be formed dominantly. Our experimental results also indicate that in many cases when cross-coupling, homocoupling, and intramolecular cyclization reactions coexist in the Cu-mediated reaction system, the reactivity decreases in the following order: cross-coupling > intramolecular cyclization > homocoupling.