1421591-15-2

Basic information

• Product Name: C₂₀H₁₄F₂O₅S₂*C₁₈H₁₅S⁽¹⁺⁾*C₄F₉O₃S^(1-)
• Synonyms: C₂₀H₁₄F₂O₅S₂*C₁₈H₁₅S⁽¹⁺⁾*C₄F₉O₃S^(1-)
• CAS NO: 1421591-15-2
• Molecular Weight: 998.934
• Mol File: 1421591-15-2.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: C₂₀H₁₄F₂O₅S₂*C₁₈H₁₅S⁽¹⁺⁾*C₄F₉O₃S^(1-)(CAS DataBase Reference)
• NIST Chemistry Reference: C₂₀H₁₄F₂O₅S₂*C₁₈H₁₅S⁽¹⁺⁾*C₄F₉O₃S^(1-)(1421591-15-2)
• EPA Substance Registry System: C₂₀H₁₄F₂O₅S₂*C₁₈H₁₅S⁽¹⁺⁾*C₄F₉O₃S^(1-)(1421591-15-2)

Safety Data

• Hazardous Substances Data: 1421591-15-2(Hazardous Substances Data)

Upstream product

• 1421591-16-3 C₂₀H₁₄F₂O₅S₂*CF₃O₃S^(1-)*C₁₈H₁₅S⁽¹⁺⁾ 
• 60453-92-1 sodium 1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate 
• 66003-78-9 triphenylsulfonium trifluoromethanesulfonate 

Relevant articles and documents

SULFONIUM COMPOUND, PHOTOACID GENERATOR, AND RESIST COMPOSITION

A sulfonium compound represented by the following formula (1), a photoacid generator containing the sulfonium compound, and a resist composition containing the photoacid generator are provided: wherein X represents an electron donor group; R1 and R2 each independently represent an alkyl group or the like; R4 to R6 each independently represent an alkyl group, or the like; R3 represents a cyclic alkenediyl group or the like; and ?A represents an anion. The sulfonium compound has a photon yield that is controllable by introducing different absorbers to the cation region in one molecule, can address the inconvenience of using a mixture of different photoacid generators when the sulfonium compound is applied as a photoacid generator, has excellent miscibility in a resist, and has enhanced resolution and line edge roughness.