16642-68-5Relevant academic research and scientific papers
PREPARATION OF TRIIODOSILANES
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Paragraph 0037-0038, (2020/07/05)
Provided is a process for preparing certain silane precursor compounds, e.g., triiodosilane from trichlorosilane utilizing lithium iodide in powder form and catalyzed by tertiary amines. The process provides triiodosilane in high yields and high purity. Triiodosilane is a precursor compound useful in the atomic layer deposition of silicon onto various microelectronic device structures.
