19329-89-6 Usage
Definition
ChEBI: A carboxylic ester obtained by the formal condensation of the carboxy group of 2-hydroxypropanoic acid with the hydroxy group of isoamylol.
Check Digit Verification of cas no
The CAS Registry Mumber 19329-89-6 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 1,9,3,2 and 9 respectively; the second part has 2 digits, 8 and 9 respectively.
Calculate Digit Verification of CAS Registry Number 19329-89:
(7*1)+(6*9)+(5*3)+(4*2)+(3*9)+(2*8)+(1*9)=136
136 % 10 = 6
So 19329-89-6 is a valid CAS Registry Number.
InChI:InChI=1/C8H16O3/c1-6(2)4-5-11-8(10)7(3)9/h6-7,9H,4-5H2,1-3H3
19329-89-6Relevant articles and documents
MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
-
, (2014/03/21)
A polymer comprising recurring units derived from a (meth)acrylate monomer of tertiary ester type having branched alkyl on alicycle is used to form a resist composition. When subjected to exposure, PEB and organic solvent development, the resist composition is improved in dissolution contrast.