19329-89-6Relevant academic research and scientific papers
MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
-
, (2014/03/21)
A polymer comprising recurring units derived from a (meth)acrylate monomer of tertiary ester type having branched alkyl on alicycle is used to form a resist composition. When subjected to exposure, PEB and organic solvent development, the resist composition is improved in dissolution contrast.
Biocide Compositions Comprising Isoamyl Lactate
-
Paragraph 0209, (2013/03/28)
Suggested are biocide compositions, comprising (a) Isoamyl lactate; (b) Biocides and optionally (c) Oil components or co-solvents and/or (d) Emulsifiers. The compositions show high solubility for biocides and improved emulsification properties.
