211565-61-6Relevant academic research and scientific papers
Trioxane derivative as an acid amplifier exhibiting a non-linear organic reaction
Arimitsu, Koji,Ichimura, Kunihiro
, p. 823 - 824 (2007/10/03)
2,4,6-Tris[2-(p-toluenesulfonyloxy)ethyl]-1,3,5-trioxane Was prepared to be subjected to the acid-catalyzed decomposition to release three p-toluenesulfonic acid molecules which were able to act as an acid amplifier to enhance the photosensitivity of a chemically amplified photoresist.
