343781-11-3

Upstream product

• 319-03-9 4-fluorophthalic anhydride 
• 10272-07-8 3.5-dimethoxyaniline 

Downstream Products

• 243459-23-6 N-[3,5-di(tert-butyldimethylsilyloxy)phenyl]-4-fluorophthalimide 
• 243459-28-1 2-(3,5-dihydroxy-phenyl)-5-fluoro-isoindole-1,3-dione 

Relevant academic research and scientific papers

New negative-type photosensitive polyimide based on hyperbranched poly(ether imide), a cross-linker, and a photoacid generator

A new negative working photosensitive polyimide, based on hyperbranched poly(ether imide) (1), 4,4′-methylenebis[2,6-bis(hydroxymethyl)]phenol (2) as a cross-linker, and a photoacid generator diphenyliodonium 9,10-dimethoxyanthracene-2-sulfonate (3) has been developed. 1 was prepared by polycon-densation of N-[3,5-di-(tert-butyldimethylsilyloxy)phenyl]-4-fluorophthalimide (4), followed by deprotection of tert-butyldimethylsilyl group with KF-HBr. The photosensitive polyimide containing 1 (70 wt%), 2 (20 wt%) and 3 (10 wt%) gave a clear negative pattern when it was exposed to 365 nm light and postbaked at 120 °C, followed by developing with a 2.38 wt% aqueous tetramethylammonium hydroxide (TMAH) solution at room temperature.