4364-07-2Relevant academic research and scientific papers
CATALYST DEHYDROGENATIVE COUPLING OF CARBOSILANES WITH AMMONIA, AMNINES AND AMIDINES
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Paragraph 00117-00118, (2016/10/27)
Si-containing film forming compositions are disclosed comprising Si-N containing precursors. Also disclosed are methods of synthesizing the same and methods of using the same for vapor deposition. In particular, a catalytic dehydrogenative coupling of carbosilanes with ammonia, amines and amidines produces the Si-N containing precursors.
Reaction of Hydrogen Peroxide with Organosilanes under Chemical Vapour Deposition Conditions
Moore, Darren L.,Taylor, Mark P.,Timms, Peter L.
, p. 2673 - 2678 (2007/10/03)
When a stream of vapour at low pressure which contained a mixture of H2O2 with an organosilane, RSiH3 (R = alkyl or alkenyl), impinged on a silicon wafer, deposition of oxide films of nominal composition RxSiO(2-0.5x), where x 3 or higher alkenyl groups. or higher alkenylgroups. Possible mechanism for the Si-C bond cleavage reaction are discussed, with energetic rearrangement of radical intermediates of type Si(H)(R)(OOH)' being favoured.
Synthesis and Characterization of Simple α-Sila- and α,ω-Disilaalkanes: Precursors for the CVD Production of Amorphous Silicon a-SiC:H
Schmidbaur, Hubert,Doerzbach, Cornelia
, p. 1088 - 1096 (2007/10/02)
Preparative methods have been explored for the synthesis of small, volatile polysilaalkanes, which could serve as starting materials for the production of amorphous silicon a-SiC:H.High yield pathways have been developed for H3SiCH2CH2SiH3 and H3SiCH2CH2CH2SiH3.These compounds can be converted into symmetrically halogen-functional derivatives through the reactions with SnCl4 or Br2.The homologous H3SiCH2CH2SiH2CH3 has also been prepared and halogenated, starting from the corresponding vinylsilane via the hydrosilylation route.Allylsilanes were the source of the synthesis of H3SiCH2CH=CH2, CH3SiH2CH2CH=CH2, SiH2(CH2CH=CH2)2, SiH2(CH2CH2CH2SiH3)2, or HSi(CH2CH2CH2SiH3)3.Methylated derivatives are also available. - Some physical and spectroscopic properties of the new compounds have been investigated.In particular, NMR data were collected and used for an assessment of structure and isomerism. - Key words: Disilaalkanes, Silanes, Amorphous Silicon, Hydrosilylation
Synthetic Pathways to Simple Di- and Trisilylmethanes: Potential Starting Materials for the CVD Deposition of Amorphous Silicon a-SiC:H
Schmidbaur, Hubert,Ebenhoech, Jan
, p. 1527 - 1534 (2007/10/02)
Methods for the preparation of simple silaalkanes with a high content of silicon and hydrogen have been explored.Target molecules, like H3SiCH2SiH3 and HC(SiH3)3, may serve as precursor molecules for the production of photovoltaic elements through thermal or discharge (plasma) CVD processes.Among a variety of synthetic pathways, the reactions between HSiCl3 and HCCl3 in the presence of an amine (Benkeser reaction) and the direct synthesis from silicon and polychloromethanes proved most promising for large scale preparations.The CH2X2/KSiH3 metathesis is most useful on the laboratory scale. - The Grignard synthesis was employed for partly methylated homologues, like H3SiCH2SiH2CH3, H3SiCH2SiH(CH3)2, H3SiCH2Si(CH3)3, and related molecules.The magnesium reduction of CHBr3/SiCl4 and CHBr3/CH3SiCl3 mixtures serves best for the preparation of HC(SiCl3)3, which can be converted into HC(SiH3)3 using LiAlH4.Attempts to synthesize tetrasilylmethane via the same route, C(SiH3)4, led only to the formation of HC(SiH3)3. - Key words: Amorphous Silicon a-SiC:H, Disilylmethane, Trisilylmethane, Direct Synthesis, Polysilylmethanes
