4861-14-7

Basic information

• Product Name: chloro(dimethoxy)silane
• Synonyms: Chloro(dimethoxy)silane; silane, chlorodimethoxy-
• CAS NO: 4861-14-7
• Molecular Formula: C₂H₇ClO₂Si
• Molecular Weight: 126.6143
• Mol File: 4861-14-7.mol
• Article Data: 2

Chemical Properties

• Boiling Point: 53.97°C at 760 mmHg
• Flash Point: -13.558°C
• Vapor Pressure: 263.161mmHg at 25°C
• CAS DataBase Reference: chloro(dimethoxy)silane(CAS DataBase Reference)
• NIST Chemistry Reference: chloro(dimethoxy)silane(4861-14-7)
• EPA Substance Registry System: chloro(dimethoxy)silane(4861-14-7)

Safety Data

• Hazardous Substances Data: 4861-14-7(Hazardous Substances Data)

Upstream product

• 67-56-1 methanol 

Relevant articles and documents

Alkoxysilylamine compounds and applications thereof

Described herein are alkoxysilylamine precursors having the following Formulae A and B: wherein R1 and R4 are independently selected from a linear or branched C1 to C10 alkyl group, a C3 to C12 alkenyl group, a C3 to C12 alkynyl group, a C4 to C10 cyclic alkyl group, and a C6 to C10 aryl group and wherein R2, R3, R4, R5, and R6 are independently selected from the group consisting of hydrogen, a linear or branched C1 to C10 alkyl group, a C2 to C12 alkenyl group, a C2 to C12 alkynyl group, a C4 to C10 cyclic alkyl, a C6 to C10 aryl group, and a linear or branched C1 to C10 alkoxy group. Also described herein are deposition processes using at least one precursor have Formulae A and/or B described herein.