55544-28-0Relevant articles and documents
UV laser-induced photolysis of silacyclopent-3-ene: Unseparable photochemistry of reactant and product for chemical vapour deposition of Si/C/H polymer
Pola, Josef,Ouchi, Akihiko,Urbanova, Marketa,Koga, Yoshinori,Bastl, Zdenek,Subrt, Jan
, p. 246 - 250 (1999)
UV laser-induced photolysis of silacyclopent-3-ene in the gas phase is a clean extrusion of silylene yielding buta-1,3-diene. Silylene self-polymerisation and consequent deposition of SinH2n agglomerates is precluded by concurrently occurring photolysis of buta-1,3-diene. The solid polymeric deposit being produced through polymerisation steps involving both H2Si: and the products of the buta-1,3-diene photolysis makes the reaction suitable for chemical vapour deposition of Si/C/H films.