65601-73-2

Basic information

• Product Name: 2-Furancarbonyl fluoride, 2,3,3,4,4,5,5-heptafluorotetrahydro-
• CAS NO: 65601-73-2
• Molecular Formula: C5F8O2
• Molecular Weight: 244.041
• Mol File: 65601-73-2.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: 2-Furancarbonyl fluoride, 2,3,3,4,4,5,5-heptafluorotetrahydro-(CAS DataBase Reference)
• NIST Chemistry Reference: 2-Furancarbonyl fluoride, 2,3,3,4,4,5,5-heptafluorotetrahydro-(65601-73-2)
• EPA Substance Registry System: 2-Furancarbonyl fluoride, 2,3,3,4,4,5,5-heptafluorotetrahydro-(65601-73-2)

Safety Data

• Hazardous Substances Data: 65601-73-2(Hazardous Substances Data)

Upstream product

• 437756-94-0 C₁₁F₂₀O₄ 

Downstream Products

• 24849-02-3 perfluoro-2,5-dihydrofuran 
• 452306-41-1 perfluoro-2,3-dihydrofuran 

Relevant articles and documents

ULTRAVIOLET-PERMEABLE FLUOROPOLYMERS AND PELLICLES MADE BY USING THE SAME

A pellicle which is excellent in transmittance and durability against short wavelength light, and which can be used for photolithography by using e.g. a KrF excimer laser, is provided. A pellicle for exposure to a light having a wavelength of at most 200 nm, which comprises a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane and/or the adhesive comprises a polymer containing repeating units represented by the following formula (1): wherein Q represents a C1-3 polyfluoroalkylene group having a linear structure, or a group having at least one atom selected from hydrogen atoms and fluorine atoms in such a polyfluoroalkylene group substituted by a substituent comprising a polyfluoroalkyl group which may contain an ethereal oxygen atom, or the like, and X represents a hydrogen atom, a fluorine atom or a C1-3 polyfluoroalkyl group which may contain an ethereal oxygen atom.