24849-02-3Relevant articles and documents
ULTRAVIOLET-PERMEABLE FLUOROPOLYMERS AND PELLICLES MADE BY USING THE SAME
-
Page/Page column 16, (2008/06/13)
A pellicle which is excellent in transmittance and durability against short wavelength light, and which can be used for photolithography by using e.g. a KrF excimer laser, is provided. A pellicle for exposure to a light having a wavelength of at most 200 nm, which comprises a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane and/or the adhesive comprises a polymer containing repeating units represented by the following formula (1): wherein Q represents a C1-3 polyfluoroalkylene group having a linear structure, or a group having at least one atom selected from hydrogen atoms and fluorine atoms in such a polyfluoroalkylene group substituted by a substituent comprising a polyfluoroalkyl group which may contain an ethereal oxygen atom, or the like, and X represents a hydrogen atom, a fluorine atom or a C1-3 polyfluoroalkyl group which may contain an ethereal oxygen atom.
PREPARATION OF SOME HIGHLY HALOGENATED DERIVATIVES OF FURAN
Dmowski, W.,Voellnagel-Neugebauer, H.
, p. 223 - 242 (2007/10/02)
Direct chlorination of 2-(2H-hexafluoropropyl)-tetrahydrofuran 1 gave high yield of 2-(2-chlorohexafluoropropyl)-pentachloro-2,5-dihydrofuran 2.Bromination of 1 gave very complex mixture of products, from which three compounds, viz. 2-bromo-5-(2H-hexafluoropropyl)-furan 3, 3-bromo-5-(2Hhexafluoropropyl)-furan 4, and 2,4-dibromo-5-(2H-hexafluoropropyl)-furan 5 were isolated.Exchange fluorination of 2 with dry KF at 240 - 300 deg led to a stepwise substitution of fluorines for chlorines to give mixtures of chloro-fluoro-2-(2-chlorohexafluoropropyl)-dihydrofurans 7,8,9 and 10 together with small amounts of 2-(2-chlorohexafluoropropyl)-3,4,5-trichlorofuran 6.Exchange fluorination of 3,4-dihalo-2,2,5,5-tetrafluoro-2,5-dihydrofurans 11a and 11b led to a substitution of fluorine for one vinylic halogen to give 3-halo-2,2,4,5,5-pentafluoro-2,5-dihydrofurans 12a and 12b in good yields.Compounds 2 - 12 were characterized by n.m.r., m.s., and i.r. spectroscopy and elemental analysis.