914774-64-4Relevant academic research and scientific papers
(Meth) acrylamide derivative, polymer, chemically amplified photosensitive resin composition, and patterning method
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Page/Page column 17, (2009/04/24)
The present invention relates to a novel (meth)acrylamide compound represented by the general formula (1), a (co)polymer of the (meth)acrylamide compound, and a chemically amplified photosensitive resin composition composed of the polymer and a photoacid generator. In the formula, R1 represents a hydrogen atom or a methyl group; R2 represents an acid-decomposable group; and R3 to R6 independently represent a hydrogen atom, a halogen atom or an alkyl group having 1 to 4 carbon atoms.
