917892-84-3Relevant academic research and scientific papers
Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane
Watanabe, Akira,Miyashita, Tokuji
, p. 1130 - 1131 (2006)
The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation. Copyright
