13598-42-0Relevant articles and documents
Infrared and mass spectroscopic study of the reaction of silyl iodide and ammonia. Infrared spectrum of silylamine
Beach, David B.
, p. 4174 - 4177 (2008/10/08)
The reaction of silyl iodide and ammonia has been studied under slowly flowing conditions using FTIR spectroscopy and mass spectroscopy. At low (0.01 mbar) partial pressures of silyl iodide in excess ammonia, monosilylamine, a long postulated intermediate in the synthesis of trisilylamine from halosilanes and ammonia, was the only silylamine observed by mass spectroscopy and infrared spectroscopy. At a silyl iodide pressure of 0.1 mbar (necessary to obtain a high signal-to-noise infrared spectrum of silylamine) a significant amount (~ 10%) of disilylamine was observed by both infrared and mass spectroscopies, demonstrating that both monosilylamine and disilylamine intermediates are produced in the gas phase. Trisilylamine was not observed as a product of the gas-phase reaction of silyl iodide and ammonia under the low-pressure conditions studied. By study of the reaction of deuterated silyl iodide and ammonia and the reaction of silyl iodide with deuterated ammonia, it was determined that the hydrogen lost in the formation of hydrogen iodide originates from the ammonia molecule. The infrared spectra of SiH3NH2, SiH3ND2, SiD3NH2, and SiD3ND2 are reported.
Direct kinetic studies of SiH3 + SiH3, H, CCl4, SiD4, Si2H6, and C3H6 by tunable infrared diode laser spectroscopy
Loh, S. K.,Jasinski, J. M.
, p. 4914 - 4926 (2007/10/02)
Gas phase reactions of silyl radical, SiH3, are investigated at room temperature using tunable diode laser flash kinetic spectroscopy.Photolytic generation of silyl at 193 and 248 nm is demonstrated using several different precursor systems.The silyl recombination reaction, SiH3 + SiH3 -> Si2H6, is studied by quantitative measurement of SiH3 and attendant product densities.Analysis yields a refinement of the rate constant, krc = (7.9 +/- 2.9) * 10-11 cm3 molecule-1 s-1.By modeling silyl densities following photolysis of HCl in SiH4, bimolecular rate constants for H + SiH3 and H + SiH4 are determined to be (2 +/- 1) * 10-11 and (2.5 +/- 0.5) * 10-13 cm3 molecule-1 s-1, respectively.Reactions of SiH3 with SiD4, Si2H6, CCl4, and C3H6 (propylene) are studied under pseudo-first-order conditions.Derived upper limits to the rate constants show these reactions to be slow at room temperature.The data demonstrate the reactivity of silyl with open-shell (radical) species and the general inertness of silyl toward closed shell molecules.Under typical chemical vapor deposition conditions, SiH3 is, therefore, a kinetically long-lived species in the gas phase and consequently a potentially important film forming species under plasma and photochemical deposition conditions.