- Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride
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Abstract - New single-source precursor to tantalum nitride thin films, (ButN)Ta(NEt2)3, and related complexes, (RN)Ta(NEt2)3 (R = Pri and Prn), were prepared by reacting correspo
- Chiu, Hsin-Tien,Chuang, Shiow-Huey,Tsai, Chung-En,Lee, Gene-Hsiang,Peng, Shie-Ming
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- A three-(diethyl amino) butyl [...] synthetic method
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The invention discloses a synthesis method of tri(diethylamino) tert-butyl amide tantalum, wherein the synthesis method comprises the following steps: 1) carrying out a mixed reaction of tantalum pentachloride and alkane, adding tert-butylamine, carrying out a reaction, then adding pyridine, carrying out a reaction, and thus obtaining a tantalum complex suspension after the reaction is completed; 2) adding diethylamine into an n-butyllithium.alkane CnH2n+2 solution, then adding the tantalum complex suspension of the step 1), and carrying out a reaction; and 3) removing a by-product lithium chloride of the liquid obtained from the reaction by a solid-liquid separator, transferring the obtained solution to a distiller, firstly, distilling off a CnH2n+2 alkane solvent with reduced pressure, and then distilling off the product tri(diethylamino)tert-butyl amide tantalum with reduced pressure. The synthesis method solves the problems of troublesome operation, low yield, low purity and high cost in the synthesis operation process of tri(diethylamino)tert-butyl amide tantalum.
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Paragraph 0031-0043
(2019/10/02)
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