169896-41-7 Usage
Uses
Different sources of media describe the Uses of 169896-41-7 differently. You can refer to the following data:
1. Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.
2. Tantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.
Check Digit Verification of cas no
The CAS Registry Mumber 169896-41-7 includes 9 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 6 digits, 1,6,9,8,9 and 6 respectively; the second part has 2 digits, 4 and 1 respectively.
Calculate Digit Verification of CAS Registry Number 169896-41:
(8*1)+(7*6)+(6*9)+(5*8)+(4*9)+(3*6)+(2*4)+(1*1)=207
207 % 10 = 7
So 169896-41-7 is a valid CAS Registry Number.
InChI:InChI=1/C4H10N/c1-3-5-4-2/h3-4H2,1-2H3/q-1
169896-41-7Relevant articles and documents
Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride
Chiu, Hsin-Tien,Chuang, Shiow-Huey,Tsai, Chung-En,Lee, Gene-Hsiang,Peng, Shie-Ming
, p. 2187 - 2190 (1998)
Abstract - New single-source precursor to tantalum nitride thin films, (ButN)Ta(NEt2)3, and related complexes, (RN)Ta(NEt2)3 (R = Pri and Prn), were prepared by reacting correspo
