Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

DOI: 10.1016/S0277-5387(98)00051-5

Source and publish data:

Polyhedron p. 2187 - 2190 (1998)

Update date:2022-08-29

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Authors:

Chiu, Hsin-Tien

Chuang, Shiow-Huey

Tsai, Chung-En

Lee, Gene-Hsiang

Peng, Shie-Ming

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Article abstract of DOI:10.1016/S0277-5387(98)00051-5

Abstract - New single-source precursor to tantalum nitride thin films, (Bu^tN)Ta(NEt₂)₃, and related complexes, (RN)Ta(NEt₂)₃ (R = Prⁱ and Prⁿ), were prepared by reacting correspo

Full text of DOI:10.1016/S0277-5387(98)00051-5

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