Technology Process of Silicon nitride (SiN)
There total 16 articles about Silicon nitride (SiN) which
guide to synthetic route it.
The literature collected by LookChem mainly comes from the sharing of users and the free literature resources found by Internet computing technology. We keep the original model of the professional version of literature to make it easier and faster for users to retrieve and use. At the same time, we analyze and calculate the most feasible synthesis route with the highest yield for your reference as below:
synthetic route:
- Guidance literature:
-
In
neat (no solvent);
radio frequency discharge (plasma pressure 70 mTorr, rf power 720 W, N2/SiH4=16);
- Guidance literature:
-
In
neat (no solvent, gas phase);
in a dc glow discharge cell, partial pressures of SiCl4 and N2 were 15 and 10 mTorr.;
DOI:10.1063/1.444682
- Guidance literature:
-
In
gaseous matrix;
byproducts: H2, Si; in a pyrex glass flow tube at 298(2) K and 400 Pa; N atoms generated in a microwave discharge through a N2/He mixt.; not isolated, H2 detected by mass spect., SiN and Si detected by chemiluminiscence;
Kinetics;
DOI:10.1016/0009-2614(86)80202-0