Technology Process of IZO
There total 5 articles about IZO which
guide to synthetic route it.
The literature collected by LookChem mainly comes from the sharing of users and the free literature resources found by Internet computing technology. We keep the original model of the professional version of literature to make it easier and faster for users to retrieve and use. At the same time, we analyze and calculate the most feasible synthesis route with the highest yield for your reference as below:
synthetic route:
- Guidance literature:
-
With
O2;
In
gaseous matrix;
film formation by low-pressure MOCVD from precursors (Zn(TMHD)2 at 78-85°C/32 sccm Ar, In(TMHD)3 at 110-112°C/32 sccm Ar, Ar carrier gas, 200 sccm O2 oxidizer gas, system pressure 470 Pa, substrate temp. 450°C); XRD,;
DOI:10.1063/1.121823
- Guidance literature:
-
With
O2;
In
gaseous matrix;
film formation by low-pressure MOCVD from precursors (Zn(TMHD)2 at 78-85°C/32 sccm Ar, In(TMHD)3 at 110-112°C/32 sccm Ar, Ar carrier gas, 200 sccm O2 oxidizer gas, system pressure 470 Pa, substrate temp. 450°C); HRTEM;
DOI:10.1063/1.121823
- Guidance literature:
-
In
neat (no solvent, gas phase);
ZnO:In2O3 (90:10) mixed for 1 h by ball milling; heated in Ta boat at temp. higher than m.p. of evaporants; evapd. on substrate at room temp. atcurrent of 4-5 A at power of 240-350 W at deposition rate of 20.+-.2 .A NG./s at pressure of 1E-6 Torr; XRD; SEM; XPS;
DOI:10.1016/j.jallcom.2012.03.077