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Tungsten hexafluoride

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Tungsten hexafluoride

EINECS 232-029-1
CAS No. 7783-82-6 Density 13.1 g/L, gas
PSA 0.00000 LogP 2.52120
Solubility Decomposes in water Melting Point 2 ºC
Formula F6W Boiling Point 17 ºC
Molecular Weight 297.84 Flash Point °C
Transport Information UN 2196 2 Appearance Colorless gas
Safety 26-36/37/39-45 Risk Codes R23/24/25;R34
Molecular Structure Molecular Structure of 7783-82-6 (Tungsten hexafluoride) Hazard Symbols ToxicTCorrosiveC
Synonyms

Tungstenfluoride (WF6) (6CI,8CI); Hexafluorotungsten; Tungsten fluoride; Tungstenhexafluoride; Tungsten hexafluoride (WF6); Tungsten(6+) fluoride; Wolframhexafluoride

Article Data 48

Tungsten hexafluoride Chemical Properties

IUPAC Name: Hexafluorotungsten
The MF of Tungsten hexafluoride (CAS NO.7783-82-6) is F6W.

                               
The MW of Tungsten hexafluoride (CAS NO.7783-82-6) is 297.83.
Synonyms of Tungsten hexafluoride (CAS NO.7783-82-6): Tungsten fluoride (WF6), (OC-6-11)-  ; Tungsten hexafluoride ; Tungsten(VI) fluoride
Apperance: A toxic corrosive light yellow liquid or gas
Boiling point: 17.5 °C
Melting Point: 2.3 °C
Water Solubility: decomposes
Merck: 13,9885
EINECS: 232-029-1

Tungsten hexafluoride Uses

 Tungsten hexafluoride (CAS NO.7783-82-6) is used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition – upon decomposition, molecules of WF6 leave a residue of metallic tungsten. This layer serves as low-resistive metallic "interconnects."

Tungsten hexafluoride Production

Tungsten hexafluoride is commonly produced by the exothermic reaction of fluorine gas with tungsten powder at a temperature between 350 and 400 °C:

W + 3 F2 → WF6
The gaseous product is condensed and separated by distillation from WOF4, a common impurity. In a variation on the direct fluorination, the metal is placed in a heated reactor, slightly pressurized to 1.2 to 2.0 psi, with a constant flow of WF6 infused with a small amount of fluorine gas.
The fluorine gas in the above method can be substituted by ClF, ClF3 or BrF3. An alternative procedure for producing tungsten fluoride is to react tungsten trioxide (WO3) with HF, BrF3 or SF4. Tungsten fluoride can also be obtained by conversion of tungsten hexachloride:
WCl6 + 6 HF → WF6 + 6 HCl or
WCl6 + 2 AsF3 → WF6 + 2 AsCl3 or
WCl6 + 3 SbF5 → WF6 + 3 SbF3Cl2

 

Tungsten hexafluoride Toxicity Data With Reference

Organism Test Type Route Reported Dose (Normalized Dose) Effect Source
guinea pig LC50 inhalation 500mg/m3 (500mg/m3) SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE

LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION
"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.
mouse LC50 inhalation 1350mg/m3 (1350mg/m3) SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE

LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION
"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.
rat LC50 inhalation 1430mg/m3 (1430mg/m3) SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE

LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION
"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.

Tungsten hexafluoride Consensus Reports

Reported in EPA TSCA Inventory.

Tungsten hexafluoride Safety Profile

A poison and corrosive liquid or gas.Safety information of Tungsten hexafluoride (CAS NO.7783-82-6):
Hazard Codes  ToxicT,CorrosiveC
Risk Statements 
23/24/25 Toxic by inhalation, in contact with skin and if swallowed
34 Causes burns
Safety Statements 
26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice
36/37/39 Wear suitable protective clothing, gloves and eye/face protection
45 In case of accident or if you feel unwell, seek medical advice immediately (show label where possible)
RIDADR  UN 2196 2.3
WGK Germany  3
RTECS  YO7720000
Hazard Note  Toxic/Corrosive
HazardClass  2.3

Tungsten hexafluoride Standards and Recommendations

OSHA PEL: TWA 2.5 mg(F)/m3
ACGIH TLV: TWA 2.5 mg(F)/m3; BEI: 3 mg/g creatinine of fluorides in urine prior to shift; 10 mg/g creatinine of fluorides in urine at end of shift; 5 mg(W)/m3; STEL 10 mg(W)/m3
DOT Classification:  2.3; Label: Poison Gas

Tungsten hexafluoride Specification

 Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colorless compound is a gas under standard conditions. With a density of about 13 g/L (roughly 11 times heavier than air.), WF6 is one of the heaviest known gases under standard conditions.

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