1120325-84-9Relevant academic research and scientific papers
Fluorine-containing photoacid generator and preparation method and application thereof
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Paragraph 0040; 0042; 0044-0045, (2021/10/27)
The invention discloses a fluorine-containing photoacid generator, relates to the technical field of photosensitive resin synthesis and comprises a structural formula E. One or both of the compounds represented by formula F, or the fluorine-containing pho
Fluorine-contained photoacid generators (PAGs) and corresponding polymer resists
Wang, Mingxing,Yueh, Wang,Gonsalves, Kenneth E.
, p. 607 - 612 (2008/12/22)
A new series of fluorinated anionic photoacid generators (PAGs) (F4-MBS-TPS, F4VBzBS-TPS, F4-IBBS-TPS, CF3 MBS-TPS, MTFBS-TPS and VBzTFBS-TPS), and corresponding PAG bound polymeric resists (HS-EA-PAG) based on hydroxystyrene (HOST) and 2-ethyl-2-adamanty
