134-23-6Relevant articles and documents
Radiation-sensitive resin composition and method for forming pattern
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Paragraph 0193-0194; 0196, (2021/07/27)
Provided are a radiation-sensitive resin composition capable of exhibiting an adequate level of sensitivity, CDU performance, and LWR performance, and a method for forming a pattern. The radiation-sensitive resin composition includes the onium salt compound represented by formula (1'), a resin including a structural unit having an acid-cleavable group, and a solvent. (Here, EA is a substituted or unsubstituted, ([alpha]+[beta])-valent organic group having 1 to 40 carbon atoms; Z+ is a monovalent radiation-sensitive onium cation; and [alpha] and [beta] are each independently 1 or 2.).