22705-33-5 Usage
General Description
Bis(dimethylamino)methylsilane is a colorless, highly unstable chemical compound identified by the CAS number 15112-89-7. As a liquid with a mild amine odor, it is typically used in the semiconductor industry due to its properties as a precursor for chemical vapor deposition and atomic layer deposition, which pertains to thin film formation on surfaces. BIS(DIMETHYLAMINO)METHYLSILANE consists of silicon, carbon, nitrogen, and hydrogen elements and is highly sensitive to moisture. Safety protocols must also be strictly followed when handling this chemical due to its potential for flammability, toxicity, and corrosive properties.
Check Digit Verification of cas no
The CAS Registry Mumber 22705-33-5 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 2,2,7,0 and 5 respectively; the second part has 2 digits, 3 and 3 respectively.
Calculate Digit Verification of CAS Registry Number 22705-33:
(7*2)+(6*2)+(5*7)+(4*0)+(3*5)+(2*3)+(1*3)=85
85 % 10 = 5
So 22705-33-5 is a valid CAS Registry Number.
InChI:InChI=1/C5H15N2Si/c1-6(2)8(5)7(3)4/h1-5H3
22705-33-5Relevant articles and documents
Chloraminosilanes II. Preparation and spectroscopic studies on alkyl-(dimethylamino)chlorosilanes
Washburne,Peterson Jr.
, p. 59 - 64 (2007/10/12)
Several new compounds containing both chloro and dimethylamino groups linked to silicon have been prepared. The general method involved reacting a solution of the appropriate polychlorosilane in ether at ca. - 50° with a chilled ethereal solution of dimethylamine. Prepared in this fashion were CH3Si(NMe2)Cl2, CH3Si(NMe2)2-Cl, PhSi(NMe2)Cl2, PhSi(NMe2)2Cl, CH3(H)Si(NMe2)Cl, (CH3)2Si(NMe2)Cl, CH2CH(CH3)Si(NMe2)Cl, and Ph2Si(NMe2)Cl. Comparison of the spectra of these compounds with those in the perhalo and peramine series showed that replacement of NMe2 for Cl resulted in an upfield shift of the resonances of the other groups linked to silicon, a shift which parallels that observed upon substitution of CH3 for Cl. The relationship of ν(SiH) in the IR and δ(SiH) in the NMR spectra was linear.