429-01-6Relevant articles and documents
Fluorinated acrylic compounds, methods for preparation of the compounds and photoresist compositions containing same
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Page 9, (2008/06/13)
Disclosed herein is an acrylic compound that can be polymerized by itself or with at least one other ethylenically unsaturated monomer to provide a polymer. The polymer may be used, for example, within a sub-200 nm photoresist composition. Also disclosed is a method to make the acrylic compound of the present invention from the raw material trifluoroacetone.