44201-67-4Relevant articles and documents
METAL(IV) TETRA-AMIDINATE COMPOUNDS AND THEIR USE IN VAPOR DEPOSITION
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Page/Page column 14, (2008/06/13)
Metal(IV) tetrakis(N,N'-dialkylamidinates) were synthesized and characterized. Exemplary metals include hafnium, zirconium, tantalum, niobium, tungsten, molybdenum, tin and uranium. These compounds are volatile, highly stable thermally, and suitable for vapor deposition of metals and their oxides, nitrides and other compounds.