511292-99-2

Basic information

• Product Name: (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
• Synonyms: TRIS(ETHYLMETHYLAMIDO)(TERT-BUTYLIMIDO)TANTALUM(V);TRIS(ETHYLMETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM;(TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
• CAS NO: 511292-99-2
• Molecular Formula: C₁₃H₃₃N₄Ta
• Molecular Weight: 426.38
• Product Categories: TantalumVapor Deposition Precursors;Catalysis and Inorganic Chemistry;Chemical Synthesis;Precursors by Metal;Tantalum
• Mol File: 511292-99-2.mol
• Article Data: 2

Chemical Properties

• Flash Point: 64 °F
• Appearance: yellow/liquid
• Density: 1.323 g/mL at 21 °C(lit.)
• Sensitive: air sensitive, moisture sensitiv
• CAS DataBase Reference: (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM(CAS DataBase Reference)
• NIST Chemistry Reference: (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM(511292-99-2)
• EPA Substance Registry System: (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM(511292-99-2)

Safety Data

• Hazard Codes: C
• Statements: 10-14/15-34
• Safety Statements: 26-36/37/39-43-45
• RIDADR: UN 3398 4.3/PG 2
• WGK Germany: 3
• Hazardous Substances Data: 511292-99-2(Hazardous Substances Data)

Upstream product

• 624-78-2 N-Ethylmethylamine 
• 7721-01-9 tantalum pentachloride 
• 75-64-9 tert-butylamine 

Downstream Products

• 950666-75-8 [Ta(NMeEt)(N(cy)2CNMeEt)2(N-tBu)] 

Relevant articles and documents

PROCESSES FOR PRODUCING TRANSITION METAL AMIDES

Processes are provided for producing transition metal amides. In methods according to this invention, at least a halogenated transition metal and an amine are combined in a solvent to produce an intermediate composition and an alkylated metal or a Grignard reagent is added to the intermediate composition to produce the transition metal amide.