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Basic Information
CAS No.: 7783-82-6
Name: Tungsten hexafluoride
Article Data: 48
Molecular Structure:
Molecular Structure of 7783-82-6 (Tungsten hexafluoride)
Formula: F6W
Molecular Weight: 297.84
Synonyms: Tungstenfluoride (WF6) (6CI,8CI); Hexafluorotungsten; Tungsten fluoride; Tungstenhexafluoride; Tungsten hexafluoride (WF6); Tungsten(6+) fluoride; Wolframhexafluoride
EINECS: 232-029-1
Density: 13.1 g/L, gas
Melting Point: 2 ºC
Boiling Point: 17 ºC
Flash Point: °C
Solubility: Decomposes in water
Appearance: Colorless gas
Hazard Symbols: ToxicTCorrosiveC
Risk Codes: R23/24/25;R34
Safety: 26-36/37/39-45
Transport Information: UN 2196 2
PSA: 0.00000
LogP: 2.52120
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Chemistry

IUPAC Name: Hexafluorotungsten
The MF of Tungsten hexafluoride (CAS NO.7783-82-6) is F6W.

                               
The MW of Tungsten hexafluoride (CAS NO.7783-82-6) is 297.83.
Synonyms of Tungsten hexafluoride (CAS NO.7783-82-6): Tungsten fluoride (WF6), (OC-6-11)-  ; Tungsten hexafluoride ; Tungsten(VI) fluoride
Apperance: A toxic corrosive light yellow liquid or gas
Boiling point: 17.5 °C
Melting Point: 2.3 °C
Water Solubility: decomposes
Merck: 13,9885
EINECS: 232-029-1

Uses

 Tungsten hexafluoride (CAS NO.7783-82-6) is used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition – upon decomposition, molecules of WF6 leave a residue of metallic tungsten. This layer serves as low-resistive metallic "interconnects."

Production

Tungsten hexafluoride is commonly produced by the exothermic reaction of fluorine gas with tungsten powder at a temperature between 350 and 400 °C:

W + 3 F2 → WF6
The gaseous product is condensed and separated by distillation from WOF4, a common impurity. In a variation on the direct fluorination, the metal is placed in a heated reactor, slightly pressurized to 1.2 to 2.0 psi, with a constant flow of WF6 infused with a small amount of fluorine gas.
The fluorine gas in the above method can be substituted by ClF, ClF3 or BrF3. An alternative procedure for producing tungsten fluoride is to react tungsten trioxide (WO3) with HF, BrF3 or SF4. Tungsten fluoride can also be obtained by conversion of tungsten hexachloride:
WCl6 + 6 HF → WF6 + 6 HCl or
WCl6 + 2 AsF3 → WF6 + 2 AsCl3 or
WCl6 + 3 SbF5 → WF6 + 3 SbF3Cl2

 

Toxicity Data With Reference

Organism Test Type Route Reported Dose (Normalized Dose) Effect Source
guinea pig LC50 inhalation 500mg/m3 (500mg/m3) SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE

LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION
"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.
mouse LC50 inhalation 1350mg/m3 (1350mg/m3) SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE

LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION
"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.
rat LC50 inhalation 1430mg/m3 (1430mg/m3) SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE

LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION
"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.

Consensus Reports

Reported in EPA TSCA Inventory.

Safety Profile

A poison and corrosive liquid or gas.Safety information of Tungsten hexafluoride (CAS NO.7783-82-6):
Hazard Codes  ToxicT,CorrosiveC
Risk Statements 
23/24/25 Toxic by inhalation, in contact with skin and if swallowed
34 Causes burns
Safety Statements 
26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice
36/37/39 Wear suitable protective clothing, gloves and eye/face protection
45 In case of accident or if you feel unwell, seek medical advice immediately (show label where possible)
RIDADR  UN 2196 2.3
WGK Germany  3
RTECS  YO7720000
Hazard Note  Toxic/Corrosive
HazardClass  2.3

Standards and Recommendations

OSHA PEL: TWA 2.5 mg(F)/m3
ACGIH TLV: TWA 2.5 mg(F)/m3; BEI: 3 mg/g creatinine of fluorides in urine prior to shift; 10 mg/g creatinine of fluorides in urine at end of shift; 5 mg(W)/m3; STEL 10 mg(W)/m3
DOT Classification:  2.3; Label: Poison Gas

Specification

 Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colorless compound is a gas under standard conditions. With a density of about 13 g/L (roughly 11 times heavier than air.), WF6 is one of the heaviest known gases under standard conditions.