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| CAS No.: | 7783-82-6 |
|---|---|
| Name: | Tungsten hexafluoride |
| Article Data: | 48 |
| Molecular Structure: | |
|
|
|
| Formula: | F6W |
| Molecular Weight: | 297.84 |
| Synonyms: | Tungstenfluoride (WF6) (6CI,8CI); Hexafluorotungsten; Tungsten fluoride; Tungstenhexafluoride; Tungsten hexafluoride (WF6); Tungsten(6+) fluoride; Wolframhexafluoride |
| EINECS: | 232-029-1 |
| Density: | 13.1 g/L, gas |
| Melting Point: | 2 ºC |
| Boiling Point: | 17 ºC |
| Flash Point: | °C |
| Solubility: | Decomposes in water |
| Appearance: | Colorless gas |
| Hazard Symbols: |
 T C
|
| Risk Codes: | R23/24/25;R34 |
| Safety: | 26-36/37/39-45 |
| Transport Information: | UN 2196 2 |
| PSA: | 0.00000 |
| LogP: | 2.52120 |
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Chemistry
IUPAC Name: Hexafluorotungsten
The MF of Tungsten hexafluoride (CAS NO.7783-82-6) is F6W.
The MW of Tungsten hexafluoride (CAS NO.7783-82-6) is 297.83.
Synonyms of Tungsten hexafluoride (CAS NO.7783-82-6): Tungsten fluoride (WF6), (OC-6-11)- ; Tungsten hexafluoride ; Tungsten(VI) fluoride
Apperance: A toxic corrosive light yellow liquid or gas
Boiling point: 17.5 °C
Melting Point: 2.3 °C
Water Solubility: decomposes
Merck: 13,9885
EINECS: 232-029-1
Uses
Tungsten hexafluoride (CAS NO.7783-82-6) is used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition – upon decomposition, molecules of WF6 leave a residue of metallic tungsten. This layer serves as low-resistive metallic "interconnects."
Production
Tungsten hexafluoride is commonly produced by the exothermic reaction of fluorine gas with tungsten powder at a temperature between 350 and 400 °C:
The fluorine gas in the above method can be substituted by ClF, ClF3 or BrF3. An alternative procedure for producing tungsten fluoride is to react tungsten trioxide (WO3) with HF, BrF3 or SF4. Tungsten fluoride can also be obtained by conversion of tungsten hexachloride:
Toxicity Data With Reference
| Organism | Test Type | Route | Reported Dose (Normalized Dose) | Effect | Source |
|---|---|---|---|---|---|
| guinea pig | LC50 | inhalation | 500mg/m3 (500mg/m3) | SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION | "Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999. |
| mouse | LC50 | inhalation | 1350mg/m3 (1350mg/m3) | SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION | "Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999. |
| rat | LC50 | inhalation | 1430mg/m3 (1430mg/m3) | SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION | "Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999. |
Consensus Reports
Reported in EPA TSCA Inventory.
Safety Profile
A poison and corrosive liquid or gas.Safety information of Tungsten hexafluoride (CAS NO.7783-82-6):
Hazard Codes 
T,
C
Risk Statements
23/24/25 Toxic by inhalation, in contact with skin and if swallowed
34 Causes burns
Safety Statements
26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice
36/37/39 Wear suitable protective clothing, gloves and eye/face protection
45 In case of accident or if you feel unwell, seek medical advice immediately (show label where possible)
RIDADR UN 2196 2.3
WGK Germany 3
RTECS YO7720000
Hazard Note Toxic/Corrosive
HazardClass 2.3
Standards and Recommendations
OSHA PEL: TWA 2.5 mg(F)/m3
ACGIH TLV: TWA 2.5 mg(F)/m3; BEI: 3 mg/g creatinine of fluorides in urine prior to shift; 10 mg/g creatinine of fluorides in urine at end of shift; 5 mg(W)/m3; STEL 10 mg(W)/m3
DOT Classification: 2.3; Label: Poison Gas
Specification
Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colorless compound is a gas under standard conditions. With a density of about 13 g/L (roughly 11 times heavier than air.), WF6 is one of the heaviest known gases under standard conditions.