B. Li, et al.
JournaloftheEuropeanCeramicSociety39(2019)4307–4312
irradiation induced dislocation loops is related to the level of lattice
damage and depth distribution. Most of lattice defects were recovered
upon annealing at 1500℃ for 30 min.
2. Experimental process
In the present study, the material is < 0001 > oriented α-Al2O3
single-crystal wafers, which were obtained from MIT Company with a
dimension of 10 × 10 × 0.5 mm3. Xe20+ ions with an energy of 5 MeV
were supplied by 320 kV High-voltage Platform in the Institute of
Modern Physics, Chinese Academy of Sciences. The irradiation fluences
were
1 × 1014 cm−2
,
5 × 1014 cm−2
,
1 × 1015 cm−2
and
5 × 1015 cm−2. The beam flux during irradiation was of the order of
1011 ions cm-2s-1 and the irradiation temperature was room tempera-
ture. Beam scanning was employed to achieve a uniform irradiation
with an area of 15 × 15 mm2. The irradiation damage in dpa and
concentration were simulated by SRIM-2008 quick cascade simulations
using the displacement energies of O = 50 eV, Al =20 eV, and density
of 3.98 g/cm3) [11]. Isochronal annealing was performed for 30 min
under argon gas flow over the temperature range from 900℃ to 1500℃.
Micro-Raman spectroscopy (μ-RS) was employed to research the
evolution of chemical bonds. μ-RS was performed using a Horiba Jobin
Yvon HR-800 spectrometer at room temperature. The excitation wa-
velength was 532 nm from the Ar+ laser and the laser spot was about
1 μm. The microstructure of the Xe irradiation-induced damage was
studied by cross-sectional transmission electron microscopy (XTEM)
and high resolution TEM (HRTEM) using a Tecnai G20 operated at
200 kV with a point resolution of 0.19 nm. The preparation process of
the XTEM sample was mechanical thinning and then Ar+ ion milling
[12,13]. The sample was observed near the [11–20] direction. The
micrograph conditions were bright field (BF) and weak-beam dark field
(WBDF). The distribution of defects under WBDF was counted with an
uncertainty of about + 20%. The thickness of the foils was determined
by electron energy loss spectrum (EELS).
Fig. 2. XTEM bright field micrograph of Al2O3 irradiated with 5 MeV Xe20+
ions to a fluence of 5 × 1015 He+/cm2 at RT, superposed the distribution of
damage and helium deposition of the Xe irradiated GaN simulated by SRIM-
2008. Electron diffraction pattern taken from the damaged layer and micro-
graph taken from the tail of the damage layer are shown as insets.
present experimental condition, the mode corresponding to A1g at
648 cm-1 is not observed, while an extra band with peak at 478 cm-1 is
observed. After Xe20+ ion irradiation, the background intensity in-
creases due to the Rayleigh scattering from the defects induced by
Xe20+ irradiation. The strong luminescence induces the raising baseline
of spectrum. Furthermore, the intensities of Raman scattering peaks
decrease with increasing the fluence. It is attributed to the increase of
optical absorption induced by Xe20+ irradiation-induced defects. It
should be noted that the Raman scattering peaks of Al2O3 can be still
clearly observed in the sample irradiated with the maximum fluence. It
indicates that the crystalline structure is remained under the present
experimental condition.
The simulated profiles of the damage and xenon deposition of Al2O3
irradiated with 5 MeV Xe20+ ions with a fluence of 5 × 1015/cm2 su-
perposed a XTEM view of the Xe20+ irradiated sample, as shown in
Fig. 2. The electron diffraction pattern demonstrates the single crystal
structure in the irradiation region, consistent with the result of Raman
spectra. According to SRIM simulation, the mean projected region Rp is
approximately 1130 nm with a straggling of ΔRp is approximately
350 nm. The maximum damage is approximately 8 dpa. Dense black
contrasts arising from Xe irradiation-induced dislocation loops, stacking
faults and strain were observed. The damaged layer ranges from surface
to a depth of 1650 nm and the irradiation damage is more serious at
depths ranging from 1350 to 1650 nm. It is clearly shown that the
SRIM-predicted Xe distribution and damage profiles are much shal-
lower than that shown by the contrasted features in the XTEM image.
Large discrepancies in the ion range between SRIM and experimental
value is due to overestimation of electronic stopping power of the
medium mass ions. Zhang et al. investigated Au+ ion irradiation in GaN
and argued a deviation of about 25% between the SRIM-predicted value
and experimental value [15]. According to the defect contrast shown in
Fig. 2, the damage peak appears located at a depth of 1500 nm, while
the maximum Xe deposition is located at a depth of 1050 nm predicted
by SRIM. There is a deviation of about 23%, consistent with Au+ ion
irradiation in GaN.
3. Results and discussion
3.1. As-implanted state
The Raman spectra of the α-Al2O3 samples before and after irra-
diated by 5 MeV Xe20+ to fluences of 1 × 1014 cm−2, 5 × 1014 cm−2
,
1 × 1015 cm−2 and 5 × 1015 cm−2 are illustrated in Fig. 1. The virgin
Al2O3 normally known as corundum with Rc space group, presents
seven Raman active phonon modes, 2A1g+5Eg (418 cm-1 and 648 cm-1
arise from A1g (internal); 378 cm-1, 432 cm-1, 451 cm-1, 755 cm-1 arise
from Eg (external); 578 cm-1 arises from Eg (internal)) [14]. In the
Fig. 3 presents weak beam dark field images of the damaged layer
for the Xe20+ irradiated Al2O3 at room temperature. The images were
taken along the [11–20] zone axis. High densities of bright contrasts
correlated to point defect clusters, dislocation loops, stacking faults and
strains were observed. Rel-rod-streaks in the (0001) plane were pre-
sented in the electron diffraction pattern, as shown in the inset of
Fig. 3(a). It indicates a very high density of dislocation loops located in
the basal plane. Image taken under g = 1–104 condition, many dis-
location loops exhibited edge-on contrast. It can be clearly visible some
dislocation loops parallel to the basal plane but others perpendicular to
Fig. 1. Raman scattering spectra of Al2O3 before and after irradiated with
5 MeV Xe20+ to fluences of 1 × 1014 cm−2, 5 × 1014 cm−2, 1 × 1015 cm−2 and
5 × 1015 cm−2 at RT.
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