Full text of DOI:10.1063/1.104374

Surface localization of the photochemical vapor deposition of SiO2 on InP at low
pressure and room temperature
F. Houzay, J. M. Moison, and C. A. Sébenne
Citation: Applied Physics Letters 58, 1071 (1991); doi: 10.1063/1.104374
View online: http://dx.doi.org/10.1063/1.104374
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/58/10?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
31.104.248.64 On: Tue, 09 Dec 2014 17:17:29
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
31.104.248.64 On: Tue, 09 Dec 2014 17:17:29
1

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
31.104.248.64 On: Tue, 09 Dec 2014 17:17:29
1