Full text of DOI:10.1063/1.105572

Evidence for a transitory composition pattern in the early stages of the
photochemical deposition of silica films on semiconductors
C. Licoppe, C. Meriadec, J. Flicstein, Y. I. Nissim, and A. C. Papadopoulo
Citation: Applied Physics Letters 59, 43 (1991); doi: 10.1063/1.105572
View online: http://dx.doi.org/10.1063/1.105572
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/59/1?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
69.166.47.134 On: Tue, 02 Dec 2014 03:36:33

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
69.166.47.134 On: Tue, 02 Dec 2014 03:36:33

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
69.166.47.134 On: Tue, 02 Dec 2014 03:36:33