Full text of DOI:10.1063/1.110916

Open air deposition of SiO2 film from a cold plasma torch of tetramethoxysilane
H2Ar system
Kiyoto Inomata, Hyunkwon Ha, Khaliq A. Chaudhary, and Hideomi Koinuma
Citation: Applied Physics Letters 64, 46 (1994); doi: 10.1063/1.110916
View online: http://dx.doi.org/10.1063/1.110916
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/64/1?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
129.120.242.61 On: Fri, 21 Nov 2014 19:33:26

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
129.120.242.61 On: Fri, 21 Nov 2014 19:33:26

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
129.120.242.61 On: Fri, 21 Nov 2014 19:33:26