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much lower deposition temperatures than previously
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conformal polycrystalline films, cubic rods or tapered
cubic rods, depending upon the deposition conditions
employed. Although no data is available to compare the
film compositions obtained in our experiments with those
from the previously reported LaCl3/BCl3/H2 system, the
results of our analysis indicate that without optimization
of our experimental parameters, we have been able to
deposit compositionally uniform, excellent quality LaB6
films with negligible amounts of contamination (0.1–
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Acknowledgements—We wish to thank the National Science
Foundation (Grant No. MSS-89-09793), the Donors of the
Petroleum Research Fund as administered by the American
Chemical Society, the Wright–Patterson Laboratory (Award
No. F33615–90–C–5291) and the Industrial Affiliates Program
of the Center for Molecular Electronics for support of this work.
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GDMS analysis.
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