Excimer laser photolysis of hexamethyldisialazane

Article abstract of DOI:10.1016/0022-328X(93)80044-C

ArF laser-induced photolysis of hexamethyldisilazane (Me3Si)2NH in the gas phase yields methane, trimethylsilane, and deposited layers of hydrolysable organosilicon oligomers.Experiments with (Me3Si)2ND reveal that early stages of the photolysis are controlled by abstraction of H or N atoms by (CH3)3Si* and CH3* radicals from H(C) and D(N) bonds and by 1,1-elimination of Me3SiD.