Surface-selective deposition of palladium and silver films from metal-organic precursors: A novel metal-organic chemical vapor deposition redox transmetalation process

DOI: 10.1021/ja00077a092

Source and publish data:

Journal of the American Chemical Society p. 11644 - 11645 (1993)

Update date:2022-08-25

Topics:

Authors:

Lin, Wenbin

Warren, Timothy H.

Nuzzo, Ralph G.

Girolami, Gregory S.

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Article abstract of DOI:10.1021/ja00077a092

Full text of DOI:10.1021/ja00077a092

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