Trimethylphosphite stabilized disilver(I) methanedisulfonates as MOCVD precursors

Article abstract of DOI:10.1016/j.poly.2011.07.025

New disilver(I) methanedisulfonates complexes {CH₂(SO ₃)₂Ag₂·[P(OMe)_3n} (n = 2, 2a; n = 4, 2b; n = 6, 2c) were prepared by reacting [CH ₂(SO₃)₂Ag₂, which could be synthesized from methanedisulfonic acid and Ag₂CO₃ in water, with trimethylphosphite in dichloromethane. The molecular structure of 2a was determined using X-ray single crystal analysis. Complex 2a exhibits an infinite chain structure with eight-membered rings (AgOSOAgOSO) fully interconnected by the third sulfonic O atoms. Complex 2b was used to deposit silver films by metal organic chemical vapor deposition (MOCVD) for the first time. The silver film obtained was characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy-dispersion X-ray analysis (EDX).