2117-18-2

Basic information

• Product Name: HEXAETHYL DISILAZANE
• Synonyms: HEXAETHYL DISILAZANE;Silanamine,1,1,1-triethyl-N-(triethylsilyl)-;1,1,1,3,3,3-Hexaethyl-disilazane
• CAS NO: 2117-18-2
• Molecular Formula: C₁₂H₃₁NSi₂
• Molecular Weight: 245.55
• Mol File: 2117-18-2.mol
• Article Data: 1

Chemical Properties

• Appearance: /
• CAS DataBase Reference: HEXAETHYL DISILAZANE(CAS DataBase Reference)
• NIST Chemistry Reference: HEXAETHYL DISILAZANE(2117-18-2)
• EPA Substance Registry System: HEXAETHYL DISILAZANE(2117-18-2)

Safety Data

• Hazardous Substances Data: 2117-18-2(Hazardous Substances Data)

Usage

General Description

Hexaethyl disilazane is a chemical compound with the molecular formula C6H19NSi2. It is a clear, colorless liquid with a faint odor. Hexaethyl disilazane is commonly used in the semiconductor and electronics industry as a surface treatment agent for improving the adhesion of photoresists to silicon and other substrates. It is also used as a reagent for the silylation of polar compounds in analytical chemistry, particularly for the derivatization of carbohydrates and other polar compounds for gas chromatography analysis. Additionally, it is used as a coupling agent in organic synthesis and as a corrosion inhibitor for metal surfaces. Hexaethyl disilazane should be handled with care due to its flammability and potential for skin and eye irritation.

Upstream product

• 109-57-9 Allylthiourea 
• 617-86-7 triethylsilane 
• 103-85-5 monophenylthiourea 

Downstream Products

• 994-49-0 hexaethyl disiloxane 
• 137823-33-7 Tris(triethylsilyl)-arsenate(V) 
• 36131-05-2 3,3-Bis

Relevant articles and documents

REACTIONS OF TRIORGANOSILANES WITH N-SUBSTITUTED THIOUREAS

-