33287-52-4 Usage
General Description
BIS(DIMETHYLAMINO)DIETHYLSILANE, also known as HMDS (hexamethyldisilazane), is a silicon-based compound that is commonly utilized in the semiconductor and electronics industries as a surface modifier and adhesion promoter. It is a colorless, volatile liquid with a strong ammonia-like odor and is highly flammable. HMDS is commonly used as a low-temperature curing agent for silicones, as a drying agent for moisture-sensitive reagents, and as a protective coating in lithography processes. It is also used as a precursor in the production of various silicon-based materials and as a reagent for the functionalization of surfaces in organic synthesis. Special precautions should be taken when handling HMDS due to its flammability and toxicity, and it should only be used in a well-ventilated area and with proper personal protective equipment.
Check Digit Verification of cas no
The CAS Registry Mumber 33287-52-4 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 3,3,2,8 and 7 respectively; the second part has 2 digits, 5 and 2 respectively.
Calculate Digit Verification of CAS Registry Number 33287-52:
(7*3)+(6*3)+(5*2)+(4*8)+(3*7)+(2*5)+(1*2)=114
114 % 10 = 4
So 33287-52-4 is a valid CAS Registry Number.
InChI:InChI=1/C8H22N2Si/c1-7-11(8-2,9(3)4)10(5)6/h7-8H2,1-6H3
33287-52-4Relevant articles and documents
Compounds useful as chemical precursors in chemical vapor deposition of silicon-based ceramic materials
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, (2008/06/13)
In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a thin layer of a ceramic material, the layer being deposited by thermal decomposition of a non-oxygen containing silicon-nitrogen precursor in the vapor phase, tin an inert or reducing gas atmosphere in order to minimize the formation of oxide ceramics.
