Trioxane derivative as an acid amplifier exhibiting a non-linear organic reaction

Article abstract of DOI:10.1246/cl.1998.823

2,4,6-Tris[2-(p-toluenesulfonyloxy)ethyl]-1,3,5-trioxane Was prepared to be subjected to the acid-catalyzed decomposition to release three p-toluenesulfonic acid molecules which were able to act as an acid amplifier to enhance the photosensitivity of a chemically amplified photoresist.