Trioxane derivative as an acid amplifier exhibiting a non-linear organic reaction

DOI: 10.1246/cl.1998.823

Source and publish data:

Chemistry Letters p. 823 - 824 (1998)

Update date:2022-08-03

Topics:

Authors:

Arimitsu, Koji

Ichimura, Kunihiro

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Article abstract of DOI:10.1246/cl.1998.823

2,4,6-Tris[2-(p-toluenesulfonyloxy)ethyl]-1,3,5-trioxane Was prepared to be subjected to the acid-catalyzed decomposition to release three p-toluenesulfonic acid molecules which were able to act as an acid amplifier to enhance the photosensitivity of a chemically amplified photoresist.

Full text of DOI:10.1246/cl.1998.823

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