Chemistry Letters p. 823 - 824 (1998)
Update date:2022-08-03
Topics:
Arimitsu, Koji
Ichimura, Kunihiro
2,4,6-Tris[2-(p-toluenesulfonyloxy)ethyl]-1,3,5-trioxane Was prepared to be subjected to the acid-catalyzed decomposition to release three p-toluenesulfonic acid molecules which were able to act as an acid amplifier to enhance the photosensitivity of a chemically amplified photoresist.
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Doi:10.1246/bcsj.41.2758
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