Fluorine-contained photoacid generators (PAGs) and corresponding polymer resists

DOI: 10.1016/j.jfluchem.2008.04.014

Source and publish data:

Journal of Fluorine Chemistry p. 607 - 612 (2008)

Update date:2022-08-03

Topics:

Authors:

Wang, Mingxing

Yueh, Wang

Gonsalves, Kenneth E.

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Article abstract of DOI:10.1016/j.jfluchem.2008.04.014

A new series of fluorinated anionic photoacid generators (PAGs) (F4-MBS-TPS, F4VBzBS-TPS, F4-IBBS-TPS, CF3 MBS-TPS, MTFBS-TPS and VBzTFBS-TPS), and corresponding PAG bound polymeric resists (HS-EA-PAG) based on hydroxystyrene (HOST) and 2-ethyl-2-adamanty

Full text of DOI:10.1016/j.jfluchem.2008.04.014

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