Journal of the Electrochemical Society p. 164 - 171 (1986)
Update date:2022-08-18
Topics:
Huffman
Navrotsky
Pintchovski
Two kinds of low pressure CVD SiO//2 samples, heterogeneous film and homogeneous 'snow', have been collected on stainless steel substrates at three different deposition temperatures: 523, 643, and 703 K. They have been characterized thermodynamically by t
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