Full text of DOI:10.1063/1.94216

Photooxidation of silicon monoxide to silicon dioxide with pulsed farultraviolet (193
nm) laser radiation
S. E. Blum, K. H. Brown, and R. Srinivasan
Citation: Applied Physics Letters 43, 1026 (1983); doi: 10.1063/1.94216
View online: http://dx.doi.org/10.1063/1.94216
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/43/11?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.209.6.50 On: Mon, 22 Dec 2014 02:07:14

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.209.6.50 On: Mon, 22 Dec 2014 02:07:14

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.209.6.50 On: Mon, 22 Dec 2014 02:07:14