Syntheses of chiral intermediates of 1-β-methylcarbapenems: (3S,4R)-3-[1(R)-tert-butyldimethylsilyloxyethyl]-4-chloroazetidin-2-one and yldimethylsilyloxyethyl]-4-[1(R)-tert-butylthiocarbonylethyl]azetidin-2-one

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