Full text of DOI:10.1063/1.106699

Aluminum oxide thin films prepared by chemical vapor deposition from
aluminum acetylacetonate
Toshiro Maruyama and Susumu Arai
Citation: Appl. Phys. Lett. 60, 322 (1992); doi: 10.1063/1.106699
View online: http://dx.doi.org/10.1063/1.106699
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Downloaded 12 Jun 2013 to 131.215.225.9. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://apl.aip.org/about/rights_and_permissions

Downloaded 12 Jun 2013 to 131.215.225.9. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://apl.aip.org/about/rights_and_permissions

Downloaded 12 Jun 2013 to 131.215.225.9. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://apl.aip.org/about/rights_and_permissions