Laser-induced deposition of alumina from condensed layers of organoaluminum compounds and water

Article abstract of DOI:10.1063/1.112378

Pure alumina were deposited on a variety of substrates by using ultraviolet laser irradiation at 4.5 eV to start reactions from a condensed mixture of trimethylaluminum (TMA) and water, held at 80 K. Development was attained with dimethylaluminum hydride and Al(hfa)₃ as the aluminum containing precursors, but with considerable contamination in the ensuing films. However, it was observed that these films, in both cases, were not as thick as those grown with TMA and water. This suggested that the primary mechanism of film deposition was by direct TMA photodissociation. Moreover, the nature of the experiments presented here indicated direct photoexcitation mechanism in the condensed layer, in contrast with earlier synchrotron radiation study where the mechanism was believed to be due chiefly to energetic secondary electrons from the substrate.

Full text of DOI:10.1063/1.112378

Laserinduced deposition of alumina from condensed layers of organoaluminum
compounds and water
J. F. Moore, D. R. Strongin, P. B. Comita, M. W. Ruckman, and Myron Strongin
Citation: Applied Physics Letters 65, 368 (1994); doi: 10.1063/1.112378
View online: http://dx.doi.org/10.1063/1.112378
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/65/3?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
28.189.204.254 On: Thu, 11 Dec 2014 09:53:42
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
28.189.204.254 On: Thu, 11 Dec 2014 09:53:42
1

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
28.189.204.254 On: Thu, 11 Dec 2014 09:53:42
1